EZ4-S small vacuum spin coater for 4 inch wafer in glove box

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产品描述

Features

1.Maximum for 4 inch wafer coating

2.Matrial:Anodic Oxidation Aluminium Shell,

3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm

4.LCD Panel with Enghlish Instruction Manual Book

5.Oiless vacuum pump with low noise

6.Can put in vacuum glove box

技术参数

Model No.	EZ4-S
Chamber Size	134mm
Maximum wafer sample	4 inch (100mm)
Vacuum Chuck	3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using *Customized vacuum chuck is availiable*
Spin Speed	100~9999RPM
Spin Control	Programmable control,5 programmable with each 5 steps can restore
Spin Resolution	1 rpm
Power supply	AC110-230V, adjustable
Dimension	250210200mm