产品描述
2.Matrial:Anodic Oxidation Aluminium Shell,
3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm
4.7"LCD Panel with Enghlish Instruction Manual Book5.Oiless vacuum pump with low noise
6.Servo motor, more stability
技术参数
| Model No. | EZ8 |
| Chamber Size | 210mm |
| Maximum wafer sample | 8 inch (200mm) |
| Chamber material | HDPE |
| Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
| Spin Speed | 100~12000RPM |
| Acceleration adjustable range | 0~50000-rpm/s |
| Each step max coating time | 3000s |
| Servo motor power | 200w |
| Spin Control | Programmable control,100programmable with each 100steps can restore |
| Spin Resolution | 1 rpm |
| Power supply | AC110-230V, adjustable |
| Dimension | 433*306*306mm |
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